3 results
Stable Ti/TaSi2/Pt Ohmic Contacts on N-Type 6H-SiC Epilayer at 600°C in Air
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 622 / 2000
- Published online by Cambridge University Press:
- 15 March 2011, T8.3.1
- Print publication:
- 2000
-
- Article
- Export citation
Deep RIE Process for Silicon Carbide Power Electronics and MEMS
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 622 / 2000
- Published online by Cambridge University Press:
- 15 March 2011, T8.9.1
- Print publication:
- 2000
-
- Article
- Export citation
Reaction Kinetics of Thermally Stable Contact Metallization on 6H-SiC
-
- Journal:
- MRS Online Proceedings Library Archive / Volume 640 / 2000
- Published online by Cambridge University Press:
- 21 March 2011, H7.5
- Print publication:
- 2000
-
- Article
- Export citation